getian_wang
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solid c

楼主#
更多 发布于:2002-11-06 22:41
请问solid c与一般的c有什么区别?
十分感谢!  
xeonjohn
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沙发#
发布于:2002-11-07 09:54
前面多了solid
我思故我在
jihongdang
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板凳#
发布于:2002-11-07 10:31
SOLID-C is a comprehensive software package for the simulation of virtually all microlithography scenarios (except 3D masks and 3D wafers). You can import a layout, e.g. in GDSII format and extract parts of it (optional module) or use the editor to create the layout. The sequence of technology steps is controlled by the process flow. The image formation in the stepper is calculated depending on the requirements using algorithms which vary from the simple to the most sophisticated , and methods from scalar to vector to beam propagation. The post-exposure bake and resist development steps also offer a variety of methods from empirical development rate models to full kinetic treatment of the chemical amplification.

Multiple exposure is a perfectly normal procedure, allowing you to assign different layouts to individual exposure steps under varying conditions. SOLID-C allows you to optimize the technology even across multiple exposures. The database supports you by providing material constants for many materials, including resists for i-line or deep UV exposure.

A large part of the functionality is centered around inspection and parameter extraction. Results from a single simulation run or from a process window calculation, e.g. an ED-Matrix, can be inspected in various ways. All views can be presented in black and white (for copies) or in color. SOLID-C can be operated interactively or in batch mode.

SOLID-C is the common base for all subsequent simulation packages of the suite. Therefore, everything described here holds for the other members as well.
jacobqzl
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地板#
发布于:2002-11-07 20:36
呵呵,英语不错呀!再用汉语解释解释?OK?
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